Laser Lift-Off System

Flexible displays have excellent advantages as thin and light, bendable and unbreakable. The Laser Lift-Off (LLO) system detaches a flexible display from a carrier glass substrate without applying stress to it. We select a UV laser of short wavelength that can be absorbed at the only surface of debonding layer, so that laser irradiation cannot affect flexible display.

Features

• Our original substrate transport stage technology brings high production capacity. (50% Up^*1)
• Available Excimer laser (308 nm) and DPSS laser (343 nm)
• Process monitoring function (Judgment to detach or not)
• Turnkey operation (Automatic irradiation condition setting by AI^*2)
• Small footprint (40% reduction^*3)

*1 Depends on the overlap rate of the line beam used by the customer.
*2 Process judgment is made with deep learning, so the customer is required to provide the pictures of their panel after LLO.
*3 Compatible with flexible panels (G6 half size).

Sales Records

Delivered to display companies in Japan, South Korea and China, etc. for mass-production system.

Specification