Technical Dictionary Glossary

An excimer laser is a type of gas laser
that generates intense ultraviolet light by using a mixture of noble gases such as argon, krypton, and xenon, combined with halogens.

Laser annealing is a process that uses a laser beam to selectively heat the surface of semiconductor wafers or glass substrates to high temperatures, altering the crystal structure and thereby enhancing properties and performance.
The laser's wavelength and power can be adjusted to control the processing areas and surface layer's penetration depth with high precision, making it suitable for a wide range of processes such as crystallization, alloying, and activation.

LTPS (low-temperature polycrystalline silicon) is a type of TFT technology used to form a polysilicon layer at low temperatures.
Since it offers over ten times the electron mobility compared to amorphous silicon TFTs, high-speed pixel switching can be achieved.

OLED (Organic EL) refers to a light-emitting diode that utilizes the phenomenon where organic materials emit light when an electric voltage is applied.
Unlike LCDs, OLEDs do not require a backlight, allowing for thinner and lighter designs, while offering high contrast and low power consumption.

"Power devices" refers to semiconductor elements that efficiently control high voltage and large current, and are generally used in electric power converters for electric vehicles and industrial devices.
In recent years, SiC power devices using silicon carbide (SiC) as a substrate for electric vehicle inverters have been attracting significant attention.

Power Module is a product that integrates a circuit composed of multiple power devices into one package. It is primarily used for electric-power conversion and control, enabling efficient electric-power management.
Power Module is utilized in a variety of devices, such as motor control systems and machine tools.

Silicon activation is a process in which atoms of an impurity are introduced into silicon and then annealing processed (annealed) using a heater, lamp, or laser. This enables the impurities to become electrically activated, allowing the generation of electrons or holes.

A SiC wafer is a semiconductor substrate made from silicon (Si) and carbon (C). Compared to conventional Si wafers, it has properties such as high-temperature stability, high voltage resistance, and high heat conductivity.
It is primarily utilized in the power electronics, automotive, and telecommunications industries.

Silicide refers to a class of compounds formed by the reaction of silicon with metals. These compounds are used to enhance properties such as heat resistance and oxidation resistance.
In power devices, laser annealing is used to thermally form a silicide layer on the backside of SiC wafers, creating an ohmic contact.

TFT LCD is a type of LCD that uses thin-film transistors (TFT).
Using a driving method called active matrix, each pixel on the display is switched on and off, offering faster response times and higher contrast ratios compared to conventional LCD.